Depth Profiles: Characterizes buried regions as they are exposed by ion etching.Chemical Analysis: Identifies bonds between specific atoms in the surface region.Compositional Analysis: Atomic abundance of all elements (except H and He) on insulators, powders, metals, etc.Because only atoms near the surface of the sample emit electrons that escape without losing energy, the technique is very surface sensitive. From the energies detected, the elements present and sometimes their chemical state (valence) can be determined. Getting Started and Training Informationīasic theory of operation: In XPS, soft x-rays (1486 eV for our instrument) illuminate a region of the sample being analyzed, and photolelectrons emanating from it are energy analyzed.
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